ALD Program Chair:
Anjana Devi
(Leibniz Institute, IFW Dresden, Germany)
ALD 2027 Program Co-Chair:
Jiyeon Kim
(Lam Research, USA)
ALD 2027 Program Co-Chair:
Jonas Sundqvist
(AlixLab, Sweden)
ALE 2027 Program Chair:
Rémi Dussart
(Université d’Orléans, France)
ALD Program Committee:
- TBD
ALD International Advisory Committee:
- Annelies Delabie (IMEC, Belgium)
- Anjana Devi (Leibniz Institute, IFW Dresden, Germany)
- Jeffrey Elam (Argonne National Lab, USA)
- Steven George (University of Colorado at Boulder, USA)
- Cheol Seong Hwang (Seoul National University, South Korea)
- Hyeongtag Jeon (Hanyang University, South Korea)
- Erwin Kessels (Eindhoven University of Technology, The Netherlands)
- Hyungjun Kim (Yonsei University, South Korea)
- Sang In Lee (Synos Foundation, USA)
- Markku Leskelä (University of Helsinki, Finland)
- Gregory N. Parsons (North Carolina State University, USA)
- Viljami Pore (ASM, Finland)
ALD Steering Committee:
- Steven George (University of Colorado at Boulder, USA)
- Erwin Kessels (University of Eindhoven, The Netherlands)
- Han-Bo-Ram (Boram) Lee (Incheon National University, South Korea)
- Gregory N. Parsons (North Carolina State University, USA
ALE Program Committee:
- TBD
ALE Steering Committee:
- Heeyeop Chae (Sungkyunkwan University, South Korea)
- Eric Joseph (IBM, USA)
- Keren Kanarik (Lam Research, USA)
- Harm Knoops (Oxford Instruments, UK)
- Steve George (University of Colorado at Boulder, USA)