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Committee

ALD/ALE 2027 Program Chairs:

ALD Program Chair:
Anjana Devi
(Leibniz Institute, IFW Dresden, Germany)

ALD 2027 Program Co-Chair:
Jiyeon Kim
(Lam Research, USA)

ALD 2027 Program Co-Chair:
Jonas Sundqvist
(AlixLab, Sweden)

ALE 2027 Program Chair:
Rémi Dussart
(Université d’Orléans, France)

ALE 2027 Program Co-Chair:
Dominik Metzler
(Black Semiconductor GmBH, Germany)

ALD Program Committee:

  • Sumit Agarwal (Colorado School of Mines, USA)
  • Ji Hwan An (POSTECH, South Korea)
  • Parag Banerjee (University of Central Florida, USA)
  • Sean Barry (Carleton University, Canada)
  • Stacey Bent (Stanford University, USA)
  • Ageeth Bol (University of Michigan, USA)
  • Rick Chen (Merck KGaA, Darmstadt, Germany)
  • Rong Chen (Huazhong University of Science and Technology, China)
  • Hanmei Choi (Samsung Electronics, South Korea)
  • Robert Clark (TEL, USA)
  • Scott B. Clendenning (Intel, USA)
  • John F. Conley, Jr. (Oregon State University, USA)
  • Mariadriana Creatore (TU Eindhoven, The Netherlands)
  • Arrelaine Dameron (Forge Nano, USA)
  • Neil P. Dasgupta (University of Michigan, USA)
  • Jolien Dendooven (Ghent University, Belgium)
  • Christophe Detavernier (Ghent University, Belgium)
  • Anjana Devi (Leibniz Institute, IFW Dresden, Germany)
  • Benjamin Greenberg (Naval Research Lab, USA)
  • Dennis Hausmann (Lam Research, USA)
  • Andrea Illiberi (ASM, Belgium)
  • Maarit Karppinen (Aalto University, Finland)
  • Wei-Min Li (Jiangsu Leadmicro Nano-Equipment Technology Ltd., China)
  • Pinyen Lin (TSMC, USA)
  • Jan Macák (Pardubice University, Czechia)
  • Adrie Mackus (Eindhoven University of Technology, The Netherlands)
  • Lucas Mai (Merck KGaA, Darmstadt, Germany)
  • Alex Martinson (Argonne National Labs, USA)
  • David Muñoz-Rojas (LMGP Grenoble, France)
  • Chang-Yong Nam (Brookhaven National Lab, USA)
  • Kornelius Nielsch (Leibniz Institute for Solid State and Materials Research, Germany)
  • Ola Nilsen (University of Oslo, Norway)
  • Michael Nolan (Tyndall University, Ireland)
  • Il-Kwon Oh (Ajou University, South Korea)
  • Venkat Pallem (Air Liquide, USA)
  • Jin-Seong Park (Hanyang University, South Korea)
  • Henrik Pedersen (Linköping University, Sweden)
  • Paul Poodt (SparkNano, The Netherlands)
  • Riikka Puurunen (Aalto University, Finland)
  • Somilkumar Rathi (Kepler Computing Inc., USA)
  • Mikko Ritala (University of Helsinki, Finland)
  • Atsushi Sakurai (Adeka Corporation, Japan)
  • Tania Sandoval (Universidad Técnica Federico Santa María, Chile)
  • Nathanaelle Schneider (CNRS Photovoltaics, France)
  • Yukihiro Shimogaki (University of Tokyo, Japan)
  • Ganesh Sundaram (Veeco, USA)
  • Christophe Valle (University at Albany – SUNY, USA)
  • Hao Van Bui (Phenikaa University, Vietnam)
  • Ruud Van Ommen (Delft University of Science & Technology, The Netherlands)
  • Paul Williams (Pegasus Chemicals, UK)
  • Charles H. Winter (Wayne State University, USA)
  • Keith Wong (Applied Materials, USA)
  • Angel Yanguas-Gil (Argonne National Lab, USA)
  • Junjie Zhao (Zhejiang University, China)

ALD International Advisory Committee:

The International Advisory Committee is comprised of the ALD Steering Committee Members, plus the following members:

  • Annelies Delabie (IMEC, Belgium)
  • Anjana Devi (Leibniz Institute, IFW Dresden, Germany)
  • Jeffrey Elam (Argonne National Lab, USA)
  • Cheol Seong Hwang (Seoul National University, South Korea)
  • Hyeongtag Jeon (Hanyang University, South Korea)
  • Hyungjun Kim (Yonsei University, South Korea)
  • Sang In Lee (Synos Foundation, USA)
  • Markku Leskelä (University of Helsinki, Finland)
  • Viljami Pore (ASM, Finland)

ALD Steering Committee:

  • Steven George (University of Colorado at Boulder, USA)
  • Erwin Kessels (University of Eindhoven, The Netherlands)
  • Han-Bo-Ram (Boram) Lee (UNIST, South Korea)
  • Gregory N. Parsons (North Carolina State University, USA

ALE Program Committee:

  • Keun Hee Bai (Samsung Electronics Co., South Korea)
  • Kyle Blakeney (Lam Research, USA)
  • Andrew Cavanagh (University of Colorado at Boulder, USA)
  • Sung-Il Cho (Samsung Electronics Co., South Korea)
  • Jean-Francois de Marneffe (IMEC, Belgium)
  • Jeff Elam (Argonne National Laboratory, USA)
  • Elina Färm (ASM Microchemistry Oy, Finland)
  • Craig Huffman (Oxford Instruments, USA)
  • Yohei Ishii (Hitachi High Technologies USA)
  • Erwin Kessels (Eindhoven University of Technology, The Netherlands)
  • Thorsten Lill (Clarycon Nanotechnology Research, USA)
  • Eric Liu (TEL, USA)
  • Anil Mane (Applied Materials, USA)
  • Cédric Mannequin (CNRS-Institut des Matériaux de Nantes Jean Rouxel, France)
  • Austin Minnich (CalTech, USA)
  • Tero Pilvi (Beneq, Finland)
  • Nicolas Possémé (CEA-Leti, France)
  • Tatayana Rakhimova (Lomonosov Moscow State University Skobeltsyn Institute, Russia)
  • Fred Roozeboom (University of Twente, The Netherlands)
  • Dmitry Suyatin (AlixLabs and Lund University, Sweden)
  • Geun Young Yeom (Sungkyunkwan University, South Korea)
  • Christophe Valle (University at Albany – SUNY, USA)

ALE Steering Committee:

  • Heeyeop Chae (Sungkyunkwan University, South Korea)
  • Eric Joseph (IBM, USA)
  • Keren Kanarik (Lam Research, USA)
  • Harm Knoops (Oxford Instruments, UK)
  • Steve George (University of Colorado at Boulder, USA)